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MEMSnet Home: MEMS-Talk: SU-8 on glass
SU-8 on glass
2007-10-08
Yue Mun Pun, Jeffrey
2007-10-08
Silvan Schmid
2007-10-09
Satyanarayan Nagarajan
2007-10-09
GARCIA BLANCO Sonia
2007-10-08
Jian Wang
2007-10-15
Gareth Jenkins
2007-10-15
Jianhua Tong
2007-10-16
Yue Mun Pun, Jeffrey
SU-8 on glass
Yue Mun Pun, Jeffrey
2007-10-08
Hi,
I am using SU-8 2000 series and may need to use it on glass wafers.  Can anyone
suggest how I can make SU-8 adhere to glass, whether I need to spin coat
Omnicoat or treat the glass with oxygen plasma?
Also, how do I dice the glass wafers?  I have tried using a manual diamond
scriber but it does not cut the glass in straight lines.

Mr. Jeffrey Mun Pun YUE
余文彬
Division of Bioengineering
E3A-07-02, Nanobioanalytics Lab
7 Engineering Drive 1
National University of Singapore
Singapore 117574
Tel: (65) 65166482, Fax: (65) 68723069
E-mail:  [email protected]
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