Sadhana,
         The concern is that exhaust can be too high. I am talking about
an extreme condition which also impacts the resist spin.

For the softbake you need to make sure you have enough softbaking. The
temperature needs to be at least 90 deg. C. I would recommend 95 to 105
range depending on your preference. Also, the time needs to be adequate.
Too short a softbake can result in not enough desolvation taking place
and the resist not having integrity. So too little softbaking is bad,
either through low temperature or too short a time. As for time, there
really isn't a problem with too long a softbake, except for through put.


Ed

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Sadhana Patil
Sent: Saturday, October 06, 2007 8:10 AM
To: General MEMS discussion
Subject: Re: [mems-talk] fudging/spreading around the PR features

On 10/6/07, Sadhana Patil  wrote:
 Thank you Ed for your help.
I was suspecting my oven bake is causing the problem...because of
trapping the gases below resist...but wasn't sure. So your point #2
seems to be my answer. In this part you mentioned that there could be
too much or too less baking (hope I understant it right). So  do you
mean too less will cause threadlike structures and too much will cause
uneven resist thickness all over?