Hello.

KOH should work and it is less dangerous in handling, compared to HF.

Best regards,

Norbert Nodes

EV Group
E-Mail: [email protected],  www.EVGroup.com

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Gary Hillman
Sent: Mittwoch, 10. Oktober 2007 19:02
To: 'jpt sharma'; 'General MEMS discussion'
Subject: RE: [mems-talk] Al2O3

J.  Alumina is really pretty chemically resistant.  The only thing that
I
think will touch it is HF and then VERY slowly.  Gary