I need to get Lithographic test masks for the EVG620.

I am looking for three types of masks.

1. Mask covered with resolution test die.

2. Mask that is one big pitch structure for image testing. (Like the old
vibration masks for Perkin-Elmers.)

3. Mask that has variable transmission for process set up.

I have already talked to EVG and I there hasn't been any progress so far
and they don't seem to understand the concept.

I am sure there are some mask shops that make the usual lithographic
test masks.  I just need to know which ones.

I would appreciate referrals to vendors for lithographic test masks.

Thanks

Ed