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MEMSnet Home: MEMS-Talk: Exposure / Dosage rate calculation
Exposure / Dosage rate calculation
2007-10-21
Vinodh Murali
2007-10-22
dbp lists
2007-10-22
Rashid, Mamun
Exposure / Dosage rate calculation
dbp lists
2007-10-22
Intensity(mW/cm2)  * time(s) = dose (mJ/cm2)  (at a given wavelength)

On 10/21/07, Vinodh Murali  wrote:
>
> Hello All,
>
> Currently I'm writing a paper and a part involves that I do some
> calculation on exposure time and dosage rate for a given intensity. I'm away
> from my university and am having trouble finding resources to help me in
> this calculation.
>
> Please let me know if there are any papers or manuals out there that would
> help me calculate the exposure time or dosage rate for a photolithographic
> process. I'd appreciate all the help this group can provide in helping me
> complete my paper.


--
Regards,
dbp
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