Hughes in Carlsbad were running Indium metal lift off for a number of
years as a production process.   13 micron thick positive resist, define
metal bumps around the edge of the die.  Use image reversal for reverse
slope for lift off.  Then 7 microns of Indium to create a flip chip with
7 micron Indium bumps.  Carry Scott nee Weatherwax is still in the
Carlsbad area and is a mine of information on the process.

Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353

[email protected]

www.yieldengineering.com


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of jpt sharma
Sent: Tuesday, October 23, 2007 11:06 AM
To: [email protected]
Subject: [mems-talk] Indium Deposition

Hi All
  I am thinking of depositing indium for metal lift off. I am wondering
anyone has done this before? Can we deposit Indium by thermal?

  Thanks
  J. Sharma