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MEMSnet Home: MEMS-Talk: Which metal is better for micro heater
Which metal is better for micro heater
2007-10-24
Steven Yang
2007-10-24
ChungHao Chen (Joseph)
2007-10-24
Cal Bear
Which metal is better for micro heater
ChungHao Chen (Joseph)
2007-10-24
Dear Yang,

Many factors determine the final temperature. For examples, the substrate area
materials' heat conductivity, and their heat capacity. Generally speaking, with
the same heating power, smaller heating area can acheive higher local
temperature.

Best,

Joseph

--
ChungHao Chen (Joseph)
Research Assistant
Purdue University
School of Electrical and Computer Engineering
EE Building Box 114
465 Northwestern Avenue
West Lafayette, IN 47907-2035
email: [email protected]



Quoting Steven Yang :

> Hi,all
> To fabricate a micro heater with metal pattern, which metal is better,
> Al, Pt, or Au? Better means using low power to achieve the same
> temperature, lets say cost less than 10mW to get temperature around
> 100-200 degree with line width around 20um.
>
reply
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