NiCr is used most often for micro heaters since its resistance changes very
little with temperature.Best wishes,Mike

> Date: Wed, 24 Oct 2007 21:36:01 +0800
> From: [email protected]
> To: [email protected]
> Subject: [mems-talk] Which metal is better for micro heater
>
> Hi,all
> To fabricate a micro heater with metal pattern, which metal is better,
> Al, Pt, or Au? Better means using low power to achieve the same
> temperature, lets say cost less than 10mW to get temperature around
> 100-200 degree with line width around 20um.