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MEMSnet Home: MEMS-Talk: etching off plated nickel
etching off plated nickel
2007-10-30
Johnson Wong
etching off plated nickel
Johnson Wong
2007-10-30
Hi:

I recently tried to use nickel plating solution from transcene to
plate poly-Si.  Afterwards I tried etching the nickel off with piranha
etch but it left a hazzy film on the poly-Si, which I suspect is
nickel oxide.  Is there any way to etch off the nickel oxide without
etching the poly-Si?

Thanks and regards,
Johnson Wong
PhD Research
School of Photovoltaic Engineering
University of New South Wales
NSW 2052, Australia
Office (04) 9385 7942
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