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MEMSnet Home: MEMS-Talk: SiN/SiN bonding and substrate etch
SiN/SiN bonding and substrate etch
2007-10-30
Nor Hafizah Ngajikin
2007-10-30
P.E.M. Kuijpers
2007-10-30
Bob Henderson
2007-11-01
Nicolas Duarte
SiN/SiN bonding and substrate etch
Nor Hafizah Ngajikin
2007-10-30
Hi,

I have a question on how and what material can be used to bond SiN (wafer 1)
with SiN (wafer 2). Secondly, does anybody know what process can be used to
totally remove a part of back side Si Wafer without affecting the SiN layer  at
the front side.

Any suggestion on foundry that can do all the processes is appreciated.

Thank you.

Hafizah
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