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MEMSnet Home: MEMS-Talk: proper glass-glass bonding
proper glass-glass bonding
2007-11-02
Mikael Evander
2007-11-02
Bob Henderson
2007-11-06
Gareth Jenkins
2007-11-05
Mikael Evander
2007-11-05
Isaac Chan
2007-11-05
Rick Williston
proper glass-glass bonding
Mikael Evander
2007-11-02
Hello.

I'm familiar with the "standard" glass-glass thermal fusion bonding method where
you wash your glass wafers, preferable surface activate them with O2-plasma or
such-like and thermo-cycle them in an oven a bit over Tg with some pressure on
the wafers. As far as I know most people using this get a pretty low bonding
efficiency, some voids and usually not the nice "mirror-finish" on the glass
that you usually see before you bond.

I'm also aware that the companies doing glass-structuring and bonding
commercially must have, and have, much better bonding efficiencies and
incredably good looking bonding.

I find it kind of surprising that whatever tips and tricks are being used in
getting at least a slightly better bond hasn't seeped out from the industry. As
far as I know at least ...

Does anyone have any nice tips and tricks to share that would help me, and
hopefully lot of other people, to get more efficient bonding?

Kind regards
Mikael


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