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MEMSnet Home: MEMS-Talk: Any photoresist etchable by XeF2?
Any photoresist etchable by XeF2?
1998-08-06
Mehmet OZGUR
Any photoresist etchable by XeF2?
Mehmet OZGUR
1998-08-06
Hi all,
I wonder if there is any kind of photoresist (or any kind of  chemical
that can be spinned and cured)
that can be etched by XeF2 ?
Has anybody observed any other material reacting with XeF2 other than
Si, Poly, some Si3N4's and a few well known metals ?
Thanks..


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