Hi all,

I want to test the contact resistance of the Al-Si interface, which is a
better testing structure that I should use?
I've read about some structures and have been confused so far. So do you
have any recommendations? I've tried the Marlow's structure. But the result
was non-linear.
Thanks a lot!

--
Yours, Travis (Xiaoning, Wang)
Undergraduate Research Assistant
MEMS Research Center
Institute of Microelectronics
School of Electrical Engineering and Computer Science
Peking University, Beijing, P.R.China

Contact Information:
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http://ime.pku.edu.cn/~wangxn
+86-10-52765288
+86-13810400670