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MEMSnet Home: MEMS-Talk: Reasons for Plasma Flickering in Oxford Plasmalab 80 Plus RIE system
Reasons for Plasma Flickering in Oxford Plasmalab 80 Plus RIE system
2007-11-12
PRAMOD GUPTA
Reasons for Plasma Flickering in Oxford Plasmalab 80Plus RIE system
2007-11-13
Jason Milne
2007-11-13
Purvi Kikani
2007-11-13
PRAMOD GUPTA
Reasons for Plasma Flickering in Oxford Plasmalab 80Plus RIE system
2007-11-13
Mike Stan
2007-11-20
PRAMOD GUPTA
2007-11-13
Nabhiraj Yalagoud
Reasons for Plasma Flickering in Oxford Plasmalab 80 Plus RIE system
PRAMOD GUPTA
2007-11-12
Hi

  Does any one know what could be the reasons for Plasma Flickering in Oxford
Plasmalab 80 Plus RIE system?. I am trying to etch polymers with SF6/O2/CHF3 gas
chemistry at 30mTorr, 200W. The recipe was working perfect earlier. Pure O2
plasma, even at 30mTorr, does not flicker at all. It starts flickering when you
mix O2 with SF6 and/or CHF3. What could be the reasons? I will appreciate your
feedback.

  With regards,


Pramod Gupta
21084 Red Fir Court
Cupertino, CA 95014
Phone: (408) 253-1646

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