Dear Sir
  This has something to do with Flourine radicle. Because It happens with my
experiment when I do Teflon like deposition using PTFE gas.
  As soon as I introduce PTFE gas inside reaction chamber, along with Nitrogen
it starts flickering.

  The moment  I switch off the PTFE gas flow, stable plasma is observed.

  Regards,


  Ms. Purvi Kikani
Facilitation Centre for Industrial Plasma Technologies
INSTITUTE FOR PLASMA RESEARCH
An Autonomous Institute of Dept. of Atomic Energy, Govt. of India
B-15-17/P, GIDC Sector 25, Gandhinagar - 382044 (Gujarat), India.
Ph: +91-79-23235025, 23235018   Fax: +91-79-23235024
Email: [email protected], [email protected] web: www.plasmaindia.com


PRAMOD GUPTA  wrote:  Hi

Does any one know what could be the reasons for Plasma Flickering in Oxford
Plasmalab 80 Plus RIE system?. I am trying to etch polymers with SF6/O2/CHF3 gas
chemistry at 30mTorr, 200W. The recipe was working perfect earlier. Pure O2
plasma, even at 30mTorr, does not flicker at all. It starts flickering when you
mix O2 with SF6 and/or CHF3. What could be the reasons?