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MEMSnet Home: MEMS-Talk: Plasma cleaning tools
Plasma cleaning tools
2007-11-14
Paul Monaghan
Plasma cleaning tools
Paul Monaghan
2007-11-14
Dear mems community;

I am looking at purchasing a plamsa cleaning tool system for cleaing surfaces.
I envisage this will most likely be a simple oxygen barrel type  asher (to
remove organic contamination from our surfaces) so nothing too exotic. I
suspect powers in the region of 20 to 200W would be suffice though this by no
means fixed. Could anyone point me in the direction of suppliers/manufacturers,
second-hand suppliers and also if you have had any positive/negative
experiences so I know what to avoid. Any comments would be appreciated,

Regards,

Paul
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