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MEMSnet Home: MEMS-Talk: Decreasing of TTV and Warp
Decreasing of TTV and Warp
2007-11-27
Andrea Mazzolari
2007-11-27
Shay Kaplan
Decreasing of TTV and Warp
Andrea Mazzolari
2007-11-27
Hi all,
i need to decrease TTV and warp of some silicon wafers.
Initial ttv<3um, warp<20 um.

I have contacted different manufacturers of silicon wafers, but many does
not focus on warp reduction.

Any suggestion about tecniques to reduce both ttv and warp ? Any
suggestion about a manufacturer who could do this job ?

Many thanks,
Andrea

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