If your Cr layer is thin you might be able to just sputter it off, even with
oxygen.

-Michael Martin
  U. of Louisville


>>>  11/28/2007 2:34 PM >>>
Has anyone had any success etching Chrome using plasmas from CHF3, SF6, O2, or
N2  (or any combination thereof)?

I don't have any good reason to suspect that any of these should work, but I
can't use normal Chlorine plasmas with this device, as the exposed Au I have
restricts which machines I'm permitted to use. I'm currently using wet etching,
but I'd like to reduce the undercutting a bit.