Hello.

Besides SEMI standards (e.g. M1-0707 for polished Si wafers), there is
also the standard DIN 50441-5, which defines some more parameters, e.g.
LTV (local thickness variation), TIR (total indicated reading) and
others.

Best regards,

Norbert Nodes

[email protected]

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Andrea Mazzolari
Sent: Donnerstag, 29. November 2007 22:01
To: [email protected]
Subject: [mems-talk] About flatness of silicon wafers

Hi All,
I'm interested to flat silicon wafers. Which are the parameters which
quantify flatness of a silicon wafer ? I know meaning of TTV, warp and
Bow.
Is there something else which is specifing flatness of a silicon wafer ?