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MEMSnet Home: MEMS-Talk: bilayer recipes, HSQ
bilayer recipes, HSQ
2007-11-30
Serena Eley
bilayer recipes, HSQ
Serena Eley
2007-11-30
Hi,
I'm trying to reduce the proximity effect for closely-spaced arrays
written in HSQ.  I've read that using a bilayer such as HSQ/PMMA or
HSQ/PR is useful for reducing the proximity effect, but I haven't
found much information online.   Anyone have a good recipe for doing
this?
Thanks!
reply
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