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MEMSnet Home: MEMS-Talk: Al electroplating recipe
Al electroplating recipe
2007-12-06
damghanian mitra
Al electroplating recipe
damghanian mitra
2007-12-06
Hi!

I'm looking for a good Al electroplating recipe for
deposition of 2um Al layer on a micron size Aluminum
pattern. Do you think particle sizes of the
electroplated Al layer would make any problem or not?
My goal is to have a smooth layer after the process.
Is there any specific cleaning issue that should be
considered before the process? I would appreciate your
comments on pre-cleaning process, electrolyte, time
and current used in the process.

Thanks,
Mitra

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