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MEMSnet Home: MEMS-Talk: TaN and IrO2 deposition
TaN and IrO2 deposition
2007-12-06
Chin-Jen Chiang
TaN and IrO2 deposition
Chin-Jen Chiang
2007-12-06
I used to deposit IrO2 with MOCVD.
  Regarding TaN, I have no idea about that.

  Lawrence

[email protected] writes:
  Hello,

Does someone know the way how do we deposit TaN and IrO2?

Best
reply
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