Plasma surface activation mat work.  I have done silicon to silicon and
glass to polymer plasma bonding.
Bill Moffat 408 954 8353=20

________________________________

From: [email protected] on behalf of Daniela K=F6gler
Sent: Wed 2/7/2007 2:00 AM
To: [email protected]
Subject: [mems-talk] anodic bonding of glass and si

Hi,

I tried to bond a glass (pyrex) and si wafer with 1000 V, 430=B0C and 30
minutes (point cathode), both wafer cleaned with acetone. Unfortunately it
did not work. There was only a vacuum between the wafers and it was
possible to separate them after the bonding.