Steven,
       A couple of things. You may well be pre baking too short for such
a thick layer.   If you have access to a blue M or a vacuum oven I
recommend a 60 minute bake at 90 C to remove the solvents.  If you can
use a vacuum oven even better.   Personal experience with 40 micron
thick positive resist led to this as an acceptable pre bake.  Also if
you can get the masks treated with a vacuum deposition of
heptadecafluorotetrahydrecylmethyldichlorosilane. It has 17 fluorine
atoms sticking up, Teflon has 13.  as a result the contact angle, a
measure of stiction is 130 degrees compared to 120 degrees for Teflon.
A really slick surface.  We are doing some work right now on this and
may be able to run free samples for you.


Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353

[email protected]

www.yieldengineering.com