Hi there,

the baking time at 95C for the 40um SU8 is not enough.
You can increase the time to 8-10 min, that will be really helpful.

Quoting Steven Yang :

> Hi, all
>
> I am using SU-8 2050 for my microfluidic pattern, but got the problem
> during the align process that the SU-8 coated sample keep sticking on
> the mask. The SU-8 sample preparation procedure I took was,
>
> 1) Spin coat SU-8 at 3000rpm accelated at 1000rpm for 40s (suppose to be
> 40um)
> 2) Pre bake at 65C for 3 mins and then 95C for 5 mins (hotplate)
>