Hello Ed,
A great book is Semiconductor Wafer Bonding: Science and Technology by Q.-Y.
Tong and U.Gosele. ISBN#0-471-57481-3 (I think there is a recent update on this
book). Many people call it the bonding bible. Dr. Gosele is very informative
if you ever get a chance to speak with him. If you are interested in Eutectic
bonding for MEMS there are a lot of good papers on the subject.
Brad
Brad Johnson
Sales Application Engineer
DJK Global
US Distributor, Semiconductor Inspection Systems
2447 W. 12th St. - Suite 6, Tempe, AZ 85281
480-968-3343 Ext 112 office
602-501-4413 cell
[email protected]
http://www.djksemi.com
-----Original Message-----
From: Edward Sebesta [mailto:[email protected]]
Sent: Wednesday, January 02, 2008 12:30 PM
To: General MEMS discussion
Subject: [mems-talk] Need recommendation on good book on bonding.
I wish to purchase a good book on wafer bonding. This book should cover
all the types of wafer bonding and survey all the issues involved. The
book should be one volume.
I would appreciate any recommendations and in particular why they
recommend a specific book.
Thanks
Ed