Hi, All,

I didn't put the condition right in the previous email. The starting
wafer is heavily doped. Here is the question again:

I'm considering grow a silicon oxide layer on a heavily doped silicon
wafer through wet or dry oxidation
process. The question is: will the oxide layer obtained in such a way be
conductive? Advices are appreciated.

Best regards

Wenlin Jin

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Wenlin Jin
Sent: Tuesday, January 08, 2008 5:10 PM
To: General MEMS discussion
Subject: [mems-talk] conductivity of SiO2 layer grown on top of
heavilydoped silicon


Hi, All,

I'm considering grow a silicon oxide layer on a heavily doped silicon
wafer through wet or dry oxidation
process. The question is: will the oxide layer obtained in such a way be
conductive? Advices are appreciated.

Best regards

Wenlin Jin