A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: TaN and IrO2 etching
TaN and IrO2 etching
2008-01-10
[email protected]
2008-01-22
Kvel Bergtatt
TaN and IrO2 etching
[email protected]
2008-01-10
Hello,

Does anyone know how to etch (wet or dry) TaN and IrO2?

Best regards,
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
MEMS Technology Review
MEMStaff Inc.
Harrick Plasma, Inc.