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MEMSnet Home: MEMS-Talk: TaN and IrO2 etching
TaN and IrO2 etching
2008-01-10
[email protected]
2008-01-22
Kvel Bergtatt
TaN and IrO2 etching
[email protected]
2008-01-10
Hello,

Does anyone know how to etch (wet or dry) TaN and IrO2?

Best regards,
reply
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