MEMS-talk

News	MEMSnet Home: MEMS-Talk: Dry etching of polyimide with PR mask Dry etching of polyimide with PR mask 2008-01-09 Zotl Ernst 2008-01-10 Jason Milne 2008-01-09 Nodes Norbert 2008-01-10 Zotl Ernst SIMOX wafer characterization 2008-01-10 Andrea Mazzolari Dry etching of polyimide with PR mask Zotl Ernst 2008-01-10 Thanks for the input! Yes, the pads are floating, they are deposited on glass substrates. reply
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