There was some nice work with 3-D inductors done at PARC (formerly Xerox
PARC) recently.
See Van Schuylenbergh et al., Tech. Dig. Int. Solid-State Circuits Conf.,
Feb 2003, pp. 392-3.
It's also described in "An Introduction to Microelectromechancial Systems
Engineering, 2nd Ed.," 2004, by Maluf and Williams, pp. 198-200.
    --Kirt Williams

----- Original Message -----
From: "Jose Guevarra" 
To: "General MEMS discussion" 
Sent: Thursday, January 17, 2008 10:38 AM
Subject: [mems-talk] Micro Conducting Coils

> Hi,
>
>  Can any of you point me to work that is being done on micro conducting
> coils?  Something like a micro inductor.