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MEMSnet Home: MEMS-Talk: High Thickness of Aluminum on Silicon
High Thickness of Aluminum on Silicon
2008-01-21
Jacques FATTACCIOLI
2008-01-21
Andrea Mazzolari
2008-01-21
Hong Chen
2008-01-22
Jacques FATTACCIOLI
2008-01-22
shay kaplan
2008-01-22
Gary Hillman
Selective, clean PDMS etch
2008-01-23
Rick Giuly
2008-01-22
David Nemeth
2008-01-21
shay kaplan
High Thickness of Aluminum on Silicon
Jacques FATTACCIOLI
2008-01-21
Hi All !

For my process, I would like to know if there is an "easy" way to get
a thick (300microns > t > 30 microns) layer of bare aluminum on a
silicon wafer ?
Evaporation and Sputtering are not suitable for this...

Thank you very much for you help

Jacques FATTACCIOLI
IIS - University of Tokyo
[email protected]
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