You can try high temp bonding of aluminum foil
Shay
-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Jacques FATTACCIOLI
Sent: Monday, January 21, 2008 3:30 AM
To: General MEMS discussion
Subject: [mems-talk] High Thickness of Aluminum on Silicon
Hi All !
For my process, I would like to know if there is an "easy" way to get
a thick (300microns > t > 30 microns) layer of bare aluminum on a
silicon wafer ?
Evaporation and Sputtering are not suitable for this...