RE: How to uniformly etch ~0.05 - 0.3um off a 3" Si
wafer?
li ling
2008-01-22
I used to try SF6 for in cryogenic temperature for etching down the silicon
surface.The surface roughness is quite well but it is a little tricky to control
the etching speed. 1.3um-2.5um/min.Maybe it is better for silicon with mask
though.
Good Luck
Paynee
