Electroplating is a good solution, but care must be taken with very thick
layers to avoid excessive stress at these thicknesses.

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Hong Chen
Sent: Monday, January 21, 2008 2:23 PM
To: [email protected]; 'General MEMS discussion'
Subject: RE: [mems-talk] High Thickness of Aluminum on Silicon

Electroplating

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Andrea Mazzolari
Sent: Monday, January 21, 2008 11:50 AM
To: General MEMS discussion
Subject: Re: [mems-talk] High Thickness of Aluminum on Silicon

Yes, this is possible with screen printing. Maybe there are other methods,
i don't know.
At physics department of Ferrara University we have the possibility to
realize such depositions.