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MEMSnet Home: MEMS-Talk: Copper
Copper
2008-01-24
Hakemi, Ghazal
2008-01-24
Bob Henderson
2008-01-24
Bill Moffat
2008-01-24
Bill Flounders
Copper
Bill Moffat
2008-01-24
Miss Ghazal,
            No it oxidizes rapidly and turns black.  It may be possible
to alternately oxidise with an Oxygen plasma then eat the oxide with a
Hydrogen containing gas or ammonia.
Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353

www.yieldengineering.com



-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Hakemi, Ghazal
Sent: Thursday, January 24, 2008 1:40 AM
To: [email protected]
Subject: [mems-talk] Copper

Dear all,

I have a chemistry-related question : does copper etch away in oxygen
plasma?
reply
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