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MEMSnet Home: MEMS-Talk: Dry etch to get patterned SiO2 hard mask
Dry etch to get patterned SiO2 hard mask
2008-02-05
alim polat
2008-02-05
Edward Sebesta
2008-02-05
Bob Henderson
2008-02-07
alim polat
2008-02-07
Bob Henderson
Dry etch to get patterned SiO2 hard mask
alim polat
2008-02-05
I have 200-400 nm thick SiO2 thin film grown using PECVD-RIE machine. Now I
need to etch the SiO2 thin film at the same machine to get patterned SiO2
hard mask. I only have CF4 and SF6 gases in the machine. Could I get some
advices on dry etching SiO2 to get patterned hard mask. Also I need what
kind pf PR I should use on top of SiO2.

Sincerely Yours

Alim Polat, PhD student
ITN, Linkoping University
Sweden
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