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MEMSnet Home: MEMS-Talk: Cantilever sowing
Cantilever sowing
2008-02-10
Ir. Elina Iervolino
2008-02-10
Denis Petrov
2008-02-11
Shao Guocheng
2008-02-11
Nicolas Duarte
2008-02-11
Miyakawa, Natsuki
Cantilever sowing
Shao Guocheng
2008-02-11
hi, there:
     if you are working on silicon wafers. one thing you can do is that you can
expose and etch some lines around your dies during the process of making the
cantilever. This way, when you get you cantilever done,
  you will have thin lines around ur dies. it will much easier to get the wafer
into single dies.  Good luck.

  Guocheng

"Ir. Elina Iervolino"  wrote:
  Hello!

I have wafers with cantilever that need to be sowing to obtain the
single die.
I tried with one but all the cantilever do not survive because of the water
flushing
on the wafer
Do anyone have experience with the sowing of the wafer with cantilever?

reply
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