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MEMSnet Home: MEMS-Talk: Ti-etching with SPR-220/7 resist
Ti-etching with SPR-220/7 resist
2008-02-06
Stoffels Steve
2008-02-06
Bill Moffat
2008-02-06
Kagan Topalli
2008-02-19
Stoffels Steve
2008-02-06
Michael D Martin
Ti-etching with SPR-220/7 resist
Stoffels Steve
2008-02-19
Every1,

Thanks for the info.  I tried the different suggestions.

Using a longer vapor HDMS primer did not solve the problem, I still got
the same amount of undercut, even after 45' of putting a vapor HDMS
primer.

The diluted solution of BHF/H2O2 did however work, a ratio of 3:1
diluted in DI water worked to reduce the undercut.

Cheers,
Steve.



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