A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Anneal recipe for Pt thin film on Si wafer
Anneal recipe for Pt thin film on Si wafer
2008-02-28
Miyakawa, Natsuki
2008-03-03
Oliver Horn
2008-03-05
Michael D Martin
2008-03-05
Gary Hillman
2008-03-05
Miyakawa, Natsuki
Anneal recipe for Pt thin film on Si wafer
Miyakawa, Natsuki
2008-02-28
Dear all,

does anyone of you know a good anneal recipe for Pt thin film e-beam
evaporated (~300nm) or sputtered (~1µm) on Si wafer (with ~100nm thermal
oxide) in order to enhence the adhesion and to stabilize the electric
resistance? I don't use adhesion layer like Ti.
Thanks!

Natsuki

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Mentor Graphics Corporation
MEMStaff Inc.
Harrick Plasma, Inc.