I've had this problem in the past, i.e. formation of Pt-Si alloys during an
anneal with (I think) a Cr adhesion layer.  Could anyone recommend a material
stack Pt/ adhesion layer/ diffusion barrier?

Thanks,
   Michael
   U. of Louisville

>>> Oliver Horn  3/3/2008 4:38 AM >>>
Hello Natsuki,

you will get PtSi or PtSi2 if you heat up Pt on Si without diffusion
barrier, even at 260°C.  The adhesion is only a bit improved.

Oliver