Hi Ian,
Your temperature and voltage conditions should work so it sounds like =
there is something wrong with your system. You may want to contact the =
AML Bondcentre for getting your wafers bonded.
Regards
Tony
Tony Rogers
Applied Microengineering Ltd
Unit 8, Library Avenue
Harwell Campus
Didcot
OX11 0SG
UK
Tel.: +44 (0)1235 434341 (DL)
Tel.: +44 (0)1235 833934 (SB)
Fax: +44 (0)1235 833935
e-mail: [email protected]
Web:http://www.aml.co.uk
-----Original Message-----
From: [email protected] on behalf of ShengYi Hsiao
Sent: Thu 06/03/2008 08:29
To: [email protected]
Subject: [mems-talk] fialed in borofloat-si bonding?[Scanned]
=20
Hi everybody.
Does anyone have experience in bonding borofloat glass to silicon wafer?
I am using recipe of 1000V and 400degree celcuse in vaccume environment,
however, after applying that bonding condition for an hour, the glass =
and=20
the
wafer still not being bonded. Only same weak connection randomly =
happened,
which results the interfering pattern. The wafers can easily be =
separated.
Does anyone know the bonding condition for borofloat glass and Si?
the FAIL experiment records are :
voltage : 1000V
temperature: 400C
pressure: 9mtorr
bonding: 1 hr
bonding current: 0.02mA (form starting to the end) ....WHY?
Charge: 0~6e-2 (form starting to the end)
Any help would be greatly appreciated.
Greetings,
IAN Hsiao.
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:=20
http://mail.mems-exchange.org/mailman/listinfo/mems-talk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==
