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MEMSnet Home: MEMS-Talk: fialed in borofloat-si bonding?
fialed in borofloat-si bonding?
2008-03-06
ShengYi Hsiao
2008-03-06
Tony Rogers
2008-03-06
Loren St. Clair
2008-03-06
Ruiz, Marcos Daniel (SENCOE)
failed in borofloat-si bonding?
2008-03-07
Brad Johnson
2008-03-10
Brubaker Chad
2008-03-11
Shay Kaplan
fialed in borofloat-si bonding?
Shay Kaplan
2008-03-11
If the Polarity is reversed there will still be current flowing as the ions
migrate in the glass but no bonding will occur.
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Brubaker Chad
Sent: Tuesday, March 11, 2008 12:21 AM
To: General MEMS discussion
Cc: Brubaker Chad
Subject: RE: [mems-talk] fialed in borofloat-si bonding?

As others have commented, the reason for no bonding is no current.  This can
be due to three possible causes:

1 - Too much resistance in the stack - thick oxide is the most likely
reason.

2 - Open circuit - make sure that your potential source is actually in
direct contact with your stack.

3 - proper polarity - make sure that you are net negative potiential to the
glass - easiest way is to have the silicon attached to a ground, and apply a
negative potential to the glass.

What kind of bonding system (if any) are you using? This may be something as
simple as an electrode out of position.

Best Regards,
Chad Brubaker
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