Hi, guys

I did more experiment on su8 coating these days. It seems in my situation, too
dry su8 leads to the cracks. As I mentioned before the su8 which I used is
expired. Somebody said that the expired su8 will be dehydrated. Hence I
decreased the prebake and softbake time. Then most of the cracks vanished after
developing in 4mins. The baked dose I used was:  softbake@50c 2mins, @90c for
4mins, move wafer out of hotplate and let it cool down to RT.
PEB@75c for 10mins, let wafer cool down with hotplate.

Sonic