A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Edge Bead Removal
Edge Bead Removal
2008-03-10
Bibbotson
2008-03-11
Brad Cantos
2008-03-11
Krueger, Bernd
2008-03-11
Peng Li
2008-03-11
Bibbotson
2008-03-11
Brad Cantos
2008-03-11
basar bolukbas
2008-03-12
Edward Sebesta
2008-03-13
Brubaker Chad
Edge Bead Removal
basar bolukbas
2008-03-11
Dear bibbotson.

You can remove your edge beats with a q-tip which dipped into acetone.
But be careful when you clean your samples edge with this q-tip in order to keep
your patterns.

As far as i know, edge beats are very important to reach min. feature size that
you desire during expose.
So you have to remove these beats.

Bye...

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Tanner EDA by Mentor Graphics
The Branford Group
University Wafer