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MEMSnet Home: MEMS-Talk: Si3N4 coating
Si3N4 coating
2008-03-12
basar bolukbas
Si3N4 coating
basar bolukbas
2008-03-12
Hi everybody.

I am trying to coat Si3N4 layer with sputter on Au layer which deposited with
e-beam evaporater. After coating my Si3N4 layer
doesnt stay on Au layer. DI water,ultrasound or etc. can brake the structure of
this Si3N4.Could you share your experience about this state please?

Thanks for your helping...
reply
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