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MEMSnet Home: MEMS-Talk: wet etch of LPCVD amorphous Silicon
wet etch of LPCVD amorphous Silicon
2008-03-12
Haixin Zhu
2008-03-13
Kvel Bergtatt
2008-03-13
Roger Shile
wet etch of LPCVD amorphous Silicon
Haixin Zhu
2008-03-12
Dear all,

I am looking for the wet etchant for LPCVD a-Si, anyone has suggestion?

Thanks

Michael
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