There are numerous wet etchants for silicon, amorphous or otherwise.
Examples include HF/HNO3 KOH, TMAH and EDP.  The one that is "THE" wet
etchant might depend on your application.

Roger Shile

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Haixin Zhu
Sent: Wednesday, March 12, 2008 3:12 PM
To: General MEMS discussion
Subject: [mems-talk] wet etch of LPCVD amorphous Silicon

Dear all,

I am looking for the wet etchant for LPCVD a-Si, anyone has suggestion?

Thanks

Michael