A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Cu etch in FeCl3
Cu etch in FeCl3
2008-03-17
Hakemi, Ghazal
2008-03-18
Ng Tien Khee (Dr)
Cu etch in FeCl3
Hakemi, Ghazal
2008-03-17
Dear All,

does copper etch anisotropically in FeCl3?
I am trying to achieve relatively straight walls.
Many thanks,

Miss Ghazal Hakemi
PhD Student=20
Microsystems and Nanotechnology Centre (Building 70)
Cranfield University
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Harrick Plasma, Inc.
MEMS Technology Review
Tanner EDA by Mentor Graphics