Hi,

I dissolve my FeCl3 powder into DI water and used the solution =
repeatedly to etch copper with minimum undercut. Adding some HCl to the =
solution helps to reduce some kind of colloid formation. FYI.

Best regards, Tien Khee

________________________________

From: Hakemi, Ghazal [mailto:[email protected]]
Sent: Mon 3/17/2008 10:21 PM
To: [email protected]
Subject: [mems-talk] Cu etch in FeCl3

Dear All,

does copper etch anisotropically in FeCl3?
I am trying to achieve relatively straight walls.
Many thanks,

Miss Ghazal Hakemi
PhD Student=3D20
Microsystems and Nanotechnology Centre (Building 70)
Cranfield University