Try Oxygen plasma.  Bill Moffat

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From: [email protected] on behalf of Jesse D Fowler
Sent: Tue 3/18/2008 8:20 AM
To: [email protected]; General MEMS discussion
Subject: Re: [mems-talk] removing sticky adhesive

I would try acetone/alcohol/water.

If that doesn't work, piranha.

"Vikrant A. Chaudhari :)"  writes:

hello,

is there a way to remove sticky adhesive, which is left over after a
cellotape is removed. we are using cello tape for masking while etching
SiN, and when cellotape is peeled of the sticky glue is left over. Is
there a better way to remove it with out scrubbing?